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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
C. Porret, A. Hikavyy, J. F. Gomez Granados, S. Baudot, A. Vohra, B. Kunert, B. Douhard, J. Bogdanowicz, A. Sammak, G. Scappucci, E. Rosseel, More Authors
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
11
Citations
(Scopus)