Very thin SiC membranes for micromachined vacuum sensors

HTM Pham; C Fan; G Pandraud; JF Creemer; NM van der Pers; P Visser; C Kwakernaak

Very thin SiC membranes for micromachined vacuum sensors

HTM Pham, C Fan, G Pandraud, JF Creemer, NM van der Pers, P Visser, C Kwakernaak

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of IEEE sensors 2008
Editors	s.n.
Place of Publication	Lecce, Italy
Publisher	IEEE Sensors
Pages	1143-1146
Number of pages	4
ISBN (Print)	978-1-4244-2581-5
Publication status	Published - 2008
Event	IEEE Sensors 2008 - Lecce, Italy Duration: 26 Oct 2008 → 29 Oct 2008

Publication series

Name
Publisher	IEEE sensors

Conference

Conference	IEEE Sensors 2008
Country/Territory	Italy
City	Lecce
Period	26/10/08 → 29/10/08

Bibliographical note

NEO (bij TNW is het in 2008 wel opgevoerd)

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{26357c8193304a6cb43e5f2c2a3ad617,

title = "Very thin SiC membranes for micromachined vacuum sensors",

keywords = "Conf.proc. > 3 pag",

author = "HTM Pham and C Fan and G Pandraud and JF Creemer and {van der Pers}, NM and P Visser and C Kwakernaak",

note = "NEO (bij TNW is het in 2008 wel opgevoerd); IEEE Sensors 2008 ; Conference date: 26-10-2008 Through 29-10-2008",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-2581-5",

publisher = "IEEE Sensors",

pages = "1143--1146",

editor = "s.n.",

booktitle = "Proceedings of IEEE sensors 2008",

}

TY - GEN

T1 - Very thin SiC membranes for micromachined vacuum sensors

AU - Pham, HTM

AU - Fan, C

AU - Pandraud, G

AU - Creemer, JF

AU - van der Pers, NM

AU - Visser, P

AU - Kwakernaak, C

N1 - NEO (bij TNW is het in 2008 wel opgevoerd)

PY - 2008

Y1 - 2008

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-2581-5

SP - 1143

EP - 1146

BT - Proceedings of IEEE sensors 2008

A2 - s.n., null

PB - IEEE Sensors

CY - Lecce, Italy

T2 - IEEE Sensors 2008

Y2 - 26 October 2008 through 29 October 2008

ER -