TY - GEN
T1 - Vibration compensation platform for robot-based nanoscale measurements
AU - Thier, Markus
AU - Saathof, Rudolf
AU - Hainisch, Reinhard
AU - Schitter, Georg
PY - 2015
Y1 - 2015
N2 - Measuring properties at the nanometre scale such as topography, morphology and roughness within a production line becomes increasingly important for quality control and process monitoring tasks. In a production line, ground vibrations are transmitted to the sample and the inspection tool, corrupting nanoscale measurements by affecting the distance between inspection tool and sample. To enable nanometre scale measurements a mechanism is needed that keeps this distance constant. This paper describes the concept and experimental results of a metrology platform that tracks the sample for nanoscale inspection. The nano inspection tool is carried by the metrology platform and is artificially coupled to the movement of the sample by using a feedback controller. A one degree of freedom experimental setup was built for demonstrating tracking performance. The implemented closed loop control achieves disturbance rejection with a bandwidth of 410 Hz and reduces emulated on-site vibrations from ±500 nm down to ±9 nm, showing significant reduction of external vibrations.
AB - Measuring properties at the nanometre scale such as topography, morphology and roughness within a production line becomes increasingly important for quality control and process monitoring tasks. In a production line, ground vibrations are transmitted to the sample and the inspection tool, corrupting nanoscale measurements by affecting the distance between inspection tool and sample. To enable nanometre scale measurements a mechanism is needed that keeps this distance constant. This paper describes the concept and experimental results of a metrology platform that tracks the sample for nanoscale inspection. The nano inspection tool is carried by the metrology platform and is artificially coupled to the movement of the sample by using a feedback controller. A one degree of freedom experimental setup was built for demonstrating tracking performance. The implemented closed loop control achieves disturbance rejection with a bandwidth of 410 Hz and reduces emulated on-site vibrations from ±500 nm down to ±9 nm, showing significant reduction of external vibrations.
KW - Active vibration isolation
KW - High precision measurement
KW - Mechatronic system design
KW - Nanometrology
UR - http://www.scopus.com/inward/record.url?scp=84936135317&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84936135317
T3 - Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
SP - 211
EP - 212
BT - Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
A2 - Leach, R.
PB - EUSPEN
T2 - 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
Y2 - 1 June 2015 through 5 June 2015
ER -