Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Joost Romijn; Sten Vollebregt; Alexander  May; Tobias  Erlbacher; Henk W. van Zeijl; Johan Leijtens; Guoqi Zhang; Pasqualina M. Sarro

doi:10.1109/MEMS51670.2022.9699533

Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Joost Romijn, Sten Vollebregt, Alexander May, Tobias Erlbacher , Henk W. van Zeijl, Johan Leijtens, Guoqi Zhang, Pasqualina M. Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

41 Downloads (Pure)

Abstract

In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.

Original language	English
Title of host publication	Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Place of Publication	Danvers
Publisher	IEEE
Pages	535-538
Number of pages	4
ISBN (Electronic)	978-1-6654-0911-7
ISBN (Print)	978-1-6654-0912-4
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699533
Publication status	Published - 2022
Event	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) - Hybrid at Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022 Conference number: 35th

Conference

Conference	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Abbreviated title	MEMS 2022
Country/Territory	Japan
City	Hybrid at Tokyo
Period	9/01/22 → 13/01/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

4H-SiC
silicon carbide
sun position sensors
UV photodetectors
wide bandgap semiconductors

Access to Document

10.1109/MEMS51670.2022.9699533

Visible_Blind_Quadrant_Sun_Position_Sensor_in_a_Silicon_Carbide_TechnologyFinal published version, 1.18 MB

Cite this

Romijn, J., Vollebregt, S., May, A., Erlbacher , T., van Zeijl, H. W., Leijtens, J., Zhang, G., & Sarro, P. M. (2022). Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology. In Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 535-538). Article 9699533 IEEE. https://doi.org/10.1109/MEMS51670.2022.9699533

@inproceedings{a3219085f9cb4f169ff082f3f5315018,

title = "Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology",

abstract = "In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.",

keywords = "4H-SiC, silicon carbide, sun position sensors, UV photodetectors, wide bandgap semiconductors",

author = "Joost Romijn and Sten Vollebregt and Alexander May and Tobias Erlbacher and {van Zeijl}, {Henk W.} and Johan Leijtens and Guoqi Zhang and Sarro, {Pasqualina M.}",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699533",

language = "English",

isbn = "978-1-6654-0912-4",

pages = "535--538",

booktitle = "Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)",

publisher = "IEEE",

address = "United States",

}

Romijn, J, Vollebregt, S, May, A, Erlbacher , T, van Zeijl, HW , Leijtens, J , Zhang, G & Sarro, PM 2022, Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology. in Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)., 9699533, IEEE, Danvers, pp. 535-538, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Hybrid at Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699533

Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology. / Romijn, Joost; Vollebregt, Sten; May, Alexander et al.
Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). Danvers: IEEE, 2022. p. 535-538 9699533.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

AU - Romijn, Joost

AU - Vollebregt, Sten

AU - May, Alexander

AU - Erlbacher , Tobias

AU - van Zeijl, Henk W.

AU - Leijtens, Johan

AU - Zhang, Guoqi

AU - Sarro, Pasqualina M.

N1 - Conference code: 35th

PY - 2022

Y1 - 2022

N2 - In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.

AB - In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.

KW - 4H-SiC

KW - silicon carbide

KW - sun position sensors

KW - UV photodetectors

KW - wide bandgap semiconductors

UR - http://www.scopus.com/inward/record.url?scp=85126397047&partnerID=8YFLogxK

U2 - 10.1109/MEMS51670.2022.9699533

DO - 10.1109/MEMS51670.2022.9699533

M3 - Conference contribution

SN - 978-1-6654-0912-4

SP - 535

EP - 538

BT - Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

PB - IEEE

CY - Danvers

T2 - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Y2 - 9 January 2022 through 13 January 2022

ER -

Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Abstract

Conference

Bibliographical note

Keywords

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Integrated silicon carbide sun position sensor system-on-chip for space applications

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