VUV performance characterization of a silicon based ultrashallow junction photodiode

L Shi, S Nihtianov, LK Nanver, U Krothc A

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010
Editors	P French et al
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	158-161
Number of pages	4
ISBN (Print)	978-90-73461-67-3
Publication status	Published - 2010
Event	13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands - Utrecht, The Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Name
Publisher	STW

Conference	13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands
Period	18/11/10 → 19/11/10

Keywords

@inproceedings{aaaffd16998940a49e51e3b75437b593,

title = "VUV performance characterization of a silicon based ultrashallow junction photodiode",

keywords = "Conf.proc. > 3 pag",

author = "L Shi and S Nihtianov and LK Nanver and {Krothc A}, U",

year = "2010",

language = "English",

isbn = "978-90-73461-67-3",

publisher = "STW",

pages = "158--161",

editor = "{French et al}, P",

booktitle = "Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010",

note = "13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",

}

VUV performance characterization of a silicon based ultrashallow junction photodiode. / Shi, L; Nihtianov, S; Nanver, LK et al.
Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. ed. / P French et al. Utrecht, The Netherlands: STW, 2010. p. 158-161.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - VUV performance characterization of a silicon based ultrashallow junction photodiode

AU - Shi, L

AU - Nihtianov, S

AU - Nanver, LK

AU - Krothc A, U

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-67-3

SP - 158

EP - 161

BT - Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010

A2 - French et al, P

PB - STW

CY - Utrecht, The Netherlands

T2 - 13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands

Y2 - 18 November 2010 through 19 November 2010

ER -