VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition

V Mohammadi, L Qi, N Golshani, C Mok Kai Rine, WB De Boer, A Sammak, J Derakhshandeh Kheljani, J van der Cingel, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)1545-1547
Number of pages3
JournalIEEE Electron Device Letters
Issue number12
Publication statusPublished - 2013

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