W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterflaken, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationInterconnect and Contact Metallization
    EditorsHS Rathore
    Pages47-55
    Number of pages9
    Publication statusPublished - 1998

    Publication series

    Name
    Name
    VolumePV97-31

    Cite this

    Schaffnit, C., Sabouret, E., van de Jeugd, CA., Oosterflaken, TGM., Janssen, GCAM., & Radelaar, S. (1998). W and WSi2 deposition by the reaction of poly-cristalline Si and WF6. In HS. Rathore (Ed.), Interconnect and Contact Metallization (pp. 47-55)