W and WSi2 deposition by the reaction of poly-cristalline Si and WF6

C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterflaken, GCAM Janssen, S Radelaar

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Interconnect and Contact Metallization
Editors	HS Rathore
Pages	47-55
Number of pages	9
Publication status	Published - 1998

Name

Name
Volume	PV97-31

Cite this

@inproceedings{cf5ffcaa58d9408ea09b595fcf5769b6,

title = "W and WSi2 deposition by the reaction of poly-cristalline Si and WF6",

author = "C Schaffnit and E Sabouret and {van de Jeugd}, CA and TGM Oosterflaken and GCAM Janssen and S Radelaar",

year = "1998",

language = "Undefined/Unknown",

pages = "47--55",

editor = "HS Rathore",

booktitle = "Interconnect and Contact Metallization",

}