Wafer bonding with nanoprecision alignment for micro/nano systems

L Jiang, G Pandraud, PJ French, SM Spearing, M kraft

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of Transducers 2007
Editors s.n.
Place of PublicationWashington
PublisherIEEE Society
Pages2103-2106
Number of pages4
ISBN (Print)1-4244-0842-3
Publication statusPublished - 2007
EventInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007. Transducers 2007, Lyon, France - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Publication series

Name
PublisherIEEE

Conference

ConferenceInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007. Transducers 2007, Lyon, France
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • professional journal papers
  • Conf.proc. > 3 pag

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