@inproceedings{42bdc6d18a6743fb91272edaea1f1f3d,
title = "Wafer bonding with nanoprecision alignment for micro/nano systems",
keywords = "professional journal papers, Conf.proc. > 3 pag",
author = "L Jiang and G Pandraud and PJ French and SM Spearing and M kraft",
year = "2007",
language = "Undefined/Unknown",
isbn = "1-4244-0842-3",
publisher = "IEEE Society",
pages = "2103--2106",
editor = "s.n.",
booktitle = "Proceedings of Transducers 2007",
note = "null ; Conference date: 10-06-2007 Through 14-06-2007",
}