Original language | English |
---|---|
Pages (from-to) | 85040-1-85040-10 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 20 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2010 |
Keywords
- academic journal papers
- CWTS 0.75 <= JFIS < 2.00
L Mele, F Santagata, G Pandraud, B Morana, FD Tichelaar, JF Creemer, PM Sarro
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 85040-1-85040-10 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 20 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2010 |