Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy

L Mele, F Santagata, G Pandraud, B Morana, FD Tichelaar, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)85040-1-85040-10
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number8
DOIs
Publication statusPublished - 2010

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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