@article{7f34257bfdb0482396c75a92365f70d6,
title = "Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy",
keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "L Mele and F Santagata and G Pandraud and B Morana and FD Tichelaar and JF Creemer and PM Sarro",
year = "2010",
doi = "10.1088/0960-1317/20/8/085040",
language = "English",
volume = "20",
pages = "85040--1--85040--10",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing",
number = "8",
}