Wafer-level direct bonding of optimized superconducting NbN for 3D chip integration

Ye Li, Amir Mirza Gheytaghi*, Miki Trifunovic, Yuanxing Xu, Guo Qi Zhang, Ryoichi Ishihara

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
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