Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger

F Santagata, L Mele, M Mihailovic, B Morana, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2009 Conference
PublisherIEEE Society
Pages799-802
Number of pages4
ISBN (Print)978-1-4244-5225-1
Publication statusPublished - 2009
EventIEEE Sensors 2009 Conference - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009

Conference

ConferenceIEEE Sensors 2009 Conference
CountryNew Zealand
CityChristchurch
Period25/10/0928/10/09

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