Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing

WF Quiros-Solano; G Pandraud; PM Sarro

doi:10.1109/ICSENS.2015.7370690

Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing

WF Quiros-Solano, G Pandraud, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 2015 IEEE SENSORS
Editors	S Tadigadapa, J Lee
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	1-4
Number of pages	4
ISBN (Print)	978-1-4799-8202-8
DOIs	https://doi.org/10.1109/ICSENS.2015.7370690
Publication status	Published - 2015
Event	SENSORS 2015, Busan, South Korea - Piscataway Duration: 1 Nov 2015 → 4 Nov 2015

Publication series

Name
Publisher	IEEE

Conference

Conference	SENSORS 2015, Busan, South Korea
Period	1/11/15 → 4/11/15

Bibliographical note

harvest

Access to Document

10.1109/ICSENS.2015.7370690

2 Citations
1 Dissertation (TU Delft)

Monolithic integration of silicon and polymer microstructures for Organ-on-Chip applications
Quiros Solano, W., 2019, 150 p.
Research output: Thesis › Dissertation (TU Delft)
10 Downloads (Pure)

Cite this

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title = "Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing",

author = "WF Quiros-Solano and G Pandraud and PM Sarro",

note = "harvest; SENSORS 2015, Busan, South Korea ; Conference date: 01-11-2015 Through 04-11-2015",

year = "2015",

doi = "10.1109/ICSENS.2015.7370690",

language = "English",

isbn = "978-1-4799-8202-8",

publisher = "IEEE Society",

pages = "1--4",

editor = "S Tadigadapa and J Lee",

booktitle = "Proceedings of the 2015 IEEE SENSORS",

}

TY - GEN

T1 - Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing

AU - Quiros-Solano, WF

AU - Pandraud, G

AU - Sarro, PM

N1 - harvest

PY - 2015

Y1 - 2015

U2 - 10.1109/ICSENS.2015.7370690

DO - 10.1109/ICSENS.2015.7370690

M3 - Conference contribution

SN - 978-1-4799-8202-8

SP - 1

EP - 4

BT - Proceedings of the 2015 IEEE SENSORS

A2 - Tadigadapa, S

A2 - Lee, J

PB - IEEE Society

CY - Piscataway

T2 - SENSORS 2015, Busan, South Korea

Y2 - 1 November 2015 through 4 November 2015

ER -

Wafer-level fabrication of strain gauges on PDMS membranes for low-pressure sensing

Publication series

Conference

Bibliographical note

Access to Document

Research output

Monolithic integration of silicon and polymer microstructures for Organ-on-Chip applications

Cite this