Wafer-level packaging for MEMS

M Bartek

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProgram Book - 2nd DISens Symposium
    Place of PublicationS.l.
    Publishers.n.
    Pages19-23
    Number of pages5
    Publication statusPublished - 2004
    Event2nd DISens Symposium, Delft, The Netherlands - S.l.
    Duration: 15 Jan 200415 Jan 2004

    Publication series

    Name
    PublisherS.n.

    Conference

    Conference2nd DISens Symposium, Delft, The Netherlands
    Period15/01/0415/01/04

    Keywords

    • Geen BTA classificatie

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