Wafer-level packaging for MEMS

M Bartek

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Program Book - 2nd DISens Symposium
Place of Publication	S.l.
Publisher	s.n.
Pages	19-23
Number of pages	5
Publication status	Published - 2004
Event	2nd DISens Symposium, Delft, The Netherlands - S.l. Duration: 15 Jan 2004 → 15 Jan 2004

Name
Publisher	S.n.

Conference	2nd DISens Symposium, Delft, The Netherlands
Period	15/01/04 → 15/01/04

ed. is niet bekend

Keywords

@inproceedings{85a93be4a2c345708d67c269a1eb4db8,

title = "Wafer-level packaging for MEMS",

keywords = "Geen BTA classificatie",

author = "M Bartek",

note = "ed. is niet bekend; 2nd DISens Symposium, Delft, The Netherlands ; Conference date: 15-01-2004 Through 15-01-2004",

year = "2004",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "19--23",

booktitle = "Program Book - 2nd DISens Symposium",

}