@inproceedings{6512669d06774c6b8160020059c6bb57,
title = "Wafer-level PECVD sic micropackaging technology for MEMS devices",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "V Rajaraman and PJ French",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-90-74702-55-3",
publisher = "STW",
pages = "1--4",
editor = "s.n.",
booktitle = "Wafer-level PECVD sic micropackaging technology for MEMS devices",
note = "Sense of contact 11 ; Conference date: 08-04-2009 Through 08-04-2009",
}