Original language | Undefined/Unknown |
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Title of host publication | Wafer-level PECVD sic micropackaging technology for MEMS devices |
Editors | s.n. |
Place of Publication | zeist, the netherlands |
Publisher | STW |
Pages | 1-4 |
Number of pages | 4 |
Publication status | Published - 2009 |
Publication series
Name | |
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Publisher | STW |
Keywords
- conference contrib. refereed
- Conf.proc. > 3 pag