Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones

Roberto Pezone; Gabriele Baglioni; Leonardo  Di Paola; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt

Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones

Roberto Pezone, Gabriele Baglioni, Leonardo Di Paola , Pasqualina M. Sarro, Peter G. Steeneken, Sten Vollebregt

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.

Original language	English
Title of host publication	Proceedings of the 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Place of Publication	Piscataway
Publisher	IEEE
Pages	362-365
Number of pages	4
ISBN (Electronic)	978-4-88686-435-2
ISBN (Print)	979-8-3503-3302-2
Publication status	Published - 2023
Event	Transducers 2023: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems - Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023

Conference

Conference	Transducers 2023: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Microphones
MEMS
graphene
membranes
wafer-scale
resonators

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@inproceedings{b82fd594e3594f1890315e807f9206b5,

title = "Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones",

abstract = "This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.",

keywords = "Microphones, MEMS, graphene, membranes, wafer-scale, resonators",

author = "Roberto Pezone and Gabriele Baglioni and {Di Paola}, Leonardo and Sarro, {Pasqualina M.} and Steeneken, {Peter G.} and Sten Vollebregt",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; Transducers 2023: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 25-06-2023 Through 29-06-2023",

year = "2023",

language = "English",

isbn = "979-8-3503-3302-2",

pages = "362--365",

booktitle = "Proceedings of the 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)",

publisher = "IEEE",

address = "United States",

}

Pezone, R, Baglioni, G, Di Paola , L, Sarro, PM , Steeneken, PG & Vollebregt, S 2023, Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones. in Proceedings of the 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, Piscataway, pp. 362-365, Transducers 2023: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, 25/06/23.

Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones. / Pezone, Roberto; Baglioni, Gabriele; Di Paola , Leonardo et al.
Proceedings of the 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Piscataway: IEEE, 2023. p. 362-365.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones

AU - Pezone, Roberto

AU - Baglioni, Gabriele

AU - Di Paola , Leonardo

AU - Sarro, Pasqualina M.

AU - Steeneken, Peter G.

AU - Vollebregt, Sten

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.

AB - This paper outlines the first transfer-free multi-layer (ML-gr) graphene-based MEMS condenser microphone with a high aspect-ratio suitable for sensitive miniaturized portable microphones. This fabrication flow avoids thick polymers needed to realize suspended graphene-polymer heterostructures over air cavities, which generally limit the response by introducing higher mass and stiffness. Several devices are characterized both mechanically and electrically, showing pull-in voltages up to 9.5 V and resonance frequency limited bandwidths of up to 127 kHz. The work paves the way to realize next-generation graphene microphones with a 4.5x area reduction compared to current state-of-the-art MEMS microphones.

KW - Microphones

KW - MEMS

KW - graphene

KW - membranes

KW - wafer-scale

KW - resonators

UR - https://ieeexplore.ieee.org/document/10517171

M3 - Conference contribution

SN - 979-8-3503-3302-2

SP - 362

EP - 365

BT - Proceedings of the 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

PB - IEEE

CY - Piscataway

T2 - Transducers 2023: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 25 June 2023 through 29 June 2023

ER -

Wafer-Scale Transfer-Free Graphene MEMS Condenser Microphones

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Keywords

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