@inproceedings{f384951d7284467d92fd0b9352e3c5ef,
title = "Wafer thinning for highly dense 3D electronic structures",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "L Wang and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
isbn = "90-73461-29-4",
publisher = "STW Technology Foundation",
pages = "214--219",
booktitle = "SAFE/ProRISC 2001: proceedings CD-ROM",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}