Wafer-to-wafer bonding for microelectromechanical systems (MEMS)

L Nicola

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology
Number of pages93
Publication statusPublished - 1999

Publication series

Name
PublisherDelft University of Technology

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Nicola, L. (1999). Wafer-to-wafer bonding for microelectromechanical systems (MEMS). Delft University of Technology.