@inproceedings{4f31d6b69cd0425b8ee02c4dc78e7126,
title = "Waferstepper alignment for MEMS applications using diffraction gratings",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "{van Zeijl}, HW and K Simon and JHCM Slabbekoorn and {van Buel}, W and CQ Gui",
year = "2002",
language = "Undefined/Unknown",
isbn = "1-55899-665-6",
publisher = "Materials Research Society",
pages = "235--240",
editor = "RP Manginell and {et al.}",
booktitle = "BioMEMS and Bionanotechnology: Symposium Proceedings of the Materials Research Society",
address = "United States",
note = "BioMEMS and Bionanotechnology, San Francisco, Cal. USA ; Conference date: 01-04-2002 Through 03-04-2002",
}