Waferstepper alignment for MEMS applications using diffraction gratings

HW van Zeijl, K Simon, JHCM Slabbekoorn, W van Buel, CQ Gui

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationBioMEMS and Bionanotechnology: Symposium Proceedings of the Materials Research Society
EditorsRP Manginell, et al.
Place of PublicationWarrendale, Penn. USA
PublisherMaterials Research Society
Pages235-240
Number of pages6
ISBN (Print)1-55899-665-6
Publication statusPublished - 2002
EventBioMEMS and Bionanotechnology, San Francisco, Cal. USA - Warrendale, Penn. USA
Duration: 1 Apr 20023 Apr 2002

Publication series

Name
PublisherMaterials Research Society
Name
Volume729

Conference

ConferenceBioMEMS and Bionanotechnology, San Francisco, Cal. USA
Period1/04/023/04/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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