Wavefront correction methods for extreme-ultraviolet multilayer reflectors

M Singh, MF Bal, JJM Braat, D Joyeux, U Dinger

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{701abf6728244d8f91e00c8b877bdce4,

title = "Wavefront correction methods for extreme-ultraviolet multilayer reflectors",

keywords = "professional journal papers, ZX CWTS JFIS < 1.00",

author = "M Singh and MF Bal and JJM Braat and D Joyeux and U Dinger",

year = "2003",

language = "Undefined/Unknown",

volume = "42",

pages = "1847--1851",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

number = "10",

}