X-ray detector based on bulk micromachined photodiode

JG Rocha, CGJ Schabmueller, NF Ramos, S Lanceros-Mendez, AGR Evans, RF Wolffenbuttel, JH Correia

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationMME'02 micromechanics Europe
Place of PublicationBucharest
PublisherNat. Inst. for Res. and Development in Microtechnologies
Pages323-326
Number of pages4
ISBN (Print)973-0-02472-3
Publication statusPublished - 2002
Event13th micromechanics Europe workshop MME 2002, Sinaia, Romania - Bucharest
Duration: 6 Oct 20028 Oct 2002

Publication series

Name
PublisherNat. Inst. for Res. and Development in Microtechnologies

Conference

Conference13th micromechanics Europe workshop MME 2002, Sinaia, Romania
Period6/10/028/10/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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