X-ray investigation of buried SiGe islands for devices with strain-enhanced mobility

N Hrauda, JJ Zhang, J Stangl, A Rehman-Khan, G Bauer, M Stoffel, OG Schmist, V Jovanovic, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)912-918
Number of pages7
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 2009


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