XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

Stefan Lampaert, H. Habib, Ron van Ostayen, Jo Spronck

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	English
Title of host publication	DSPE Conference 2016 on Precision Mechatronics
Pages	52-61
Publication status	Published - 2016
Event	DSPE Conference 2016 on Precision Mechatronics - Sint Michielsgestel, Netherlands Duration: 4 Oct 2016 → 5 Oct 2016

Conference	DSPE Conference 2016 on Precision Mechatronics
Country/Territory	Netherlands
City	Sint Michielsgestel
Period	4/10/16 → 5/10/16

Cite this

@inproceedings{6c613834078a415cbd84ad1129d02ba8,

title = "XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings",

author = "Stefan Lampaert and H. Habib and {van Ostayen}, Ron and Jo Spronck",

year = "2016",

language = "English",

pages = "52--61",

booktitle = "DSPE Conference 2016 on Precision Mechatronics",

note = "DSPE Conference 2016 on Precision Mechatronics ; Conference date: 04-10-2016 Through 05-10-2016",

}

TY - GEN

T1 - XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

AU - Lampaert, Stefan

AU - Habib, H.

AU - van Ostayen, Ron

AU - Spronck, Jo

PY - 2016

Y1 - 2016

M3 - Conference contribution

SP - 52

EP - 61

BT - DSPE Conference 2016 on Precision Mechatronics

T2 - DSPE Conference 2016 on Precision Mechatronics

Y2 - 4 October 2016 through 5 October 2016

ER -