XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageEnglish
Title of host publicationDSPE Conference 2016 on Precision Mechatronics
Pages52-61
Publication statusPublished - 2016
EventDSPE Conference 2016 on Precision Mechatronics - Sint Michielsgestel, Netherlands
Duration: 4 Oct 20165 Oct 2016

Conference

ConferenceDSPE Conference 2016 on Precision Mechatronics
CountryNetherlands
CitySint Michielsgestel
Period4/10/165/10/16

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