@inproceedings{c9253fbf47d247a5824b26b0fc5cbe33,
title = "Zernike generation with a non-contact, thermally actuated deformable mirror",
abstract = "Wavefront aberrations are commonly expressed in a series of orthogonal Zernike polynomial terms [1]. Each of these Zernike polynomials mathematically describes a certain typical deviation from an ideal wavefront. To correct for optical aberrations a deformable mirror must be able to actuate the shapes corresponding to these terms. This paper presents the results of experiments to actuate a deformable mirror surface, using a non-contact thermal actuation principle. Thermal radiation induces a temperature distribution on the mirror substrate which causes mirror surface deformation. In the experiments, shapes are actuated up to Z3³ with amplitudes ~ 60 [nm] and ~ 3 [nm] root mean square (RMS) shape error.",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "GJM Schutten and R Saathof and JW Spronck and {Munnig Schmidt}, RH",
year = "2012",
language = "English",
isbn = "978-0-9566790-0-0",
publisher = "EUSPEN",
pages = "439--442",
editor = "P Shore and H Spaan and T Burke",
booktitle = "Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology (euspen), June 4th-7th 2012, Stockholm, Sweden",
note = "12th international conference of the european society for precision engineering and nanotechnology (euspen), Stockholm, Sweden ; Conference date: 04-06-2012 Through 07-06-2012",
}