%PDF-1.5
%
1 0 obj
<<
/Metadata 2 0 R
/Names 3 0 R
/OpenAction 4 0 R
/Outlines 5 0 R
/PageMode /UseOutlines
/Pages 6 0 R
/Type /Catalog
>>
endobj
7 0 obj
<<
/Author (T. Verduin)
/CreationDate (D:20160210150443+01'00')
/Creator (LaTeX with hyperref package)
/Keywords (electron-matter interaction, Monte-Carlo simulation, secondary electron yield, scanning electron microscopy, line edge roughness)
/ModDate (D:20180918172033+02'00')
/PTEX.Fullbanner (This is pdfTeX, Version 3.1415926-2.5-1.40.14 \(TeX Live 2013/Debian\) kpathsea version 6.1.1)
/Producer (pdfTeX-1.40.14)
/Subject (electron-matter interaction)
/Title (Sensitivity of secondary electron yields and SEM images to scattering parameters in MC simulations)
/Trapped /False
>>
endobj
2 0 obj
<<
/Length 4126
/Subtype /XML
/Type /Metadata
>>
stream
application/pdf
T. Verduin
electron-matter interaction
Sensitivity of secondary electron yields and SEM images to scattering parameters in MC simulations
2016-02-10T15:04:43+01:00
LaTeX with hyperref package
2018-09-18T17:20:33+02:00
2018-09-18T17:20:33+02:00
electron-matter interaction, Monte-Carlo simulation, secondary electron yield, scanning electron microscopy, line edge roughness
pdfTeX-1.40.14
False
This is pdfTeX, Version 3.1415926-2.5-1.40.14 (TeX Live 2013/Debian) kpathsea version 6.1.1
uuid:f5e386e6-8c19-426a-8f3f-f200f88796da
uuid:0cca5d57-ea70-409e-8969-55b7d2a1d391
endstream
endobj
3 0 obj
<<
/Dests 8 0 R
>>
endobj
4 0 obj
<<
/D [9 0 R /Fit]
/S /GoTo
>>
endobj
5 0 obj
<<
/Count 3
/First 10 0 R
/Last 11 0 R
/Type /Outlines
>>
endobj
6 0 obj
<<
/Count 9
/Kids [12 0 R 13 0 R]
/Type /Pages
>>
endobj
8 0 obj
<<
/Kids [14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R]
/Limits [(Doc-Start) (table.caption.5)]
>>
endobj
9 0 obj
<<
/Contents 20 0 R
/CropBox [0 0 612 792]
/MediaBox [0 0 612 792]
/Parent 12 0 R
/Resources 21 0 R
/Rotate 0
/Type /Page
>>
endobj
10 0 obj
<<
/A 22 0 R
/Next 23 0 R
/Parent 5 0 R
/Title (Introduction)
>>
endobj
11 0 obj
<<
/A 24 0 R
/Parent 5 0 R
/Prev 23 0 R
/Title (Conclusion)
>>
endobj
12 0 obj
<<
/Count 7
/Kids [25 0 R 9 0 R 26 0 R 27 0 R 28 0 R 29 0 R 30 0 R]
/Parent 6 0 R
/Type /Pages
>>
endobj
13 0 obj
<<
/Count 2
/Kids [31 0 R 32 0 R]
/Parent 6 0 R
/Type /Pages
>>
endobj
14 0 obj
<<
/Limits [(Doc-Start) (cite.Kieft2008)]
/Names [(Doc-Start) 33 0 R (Hfootnote.1) 34 0 R (Hfootnote.2) 35 0 R (Hfootnote.3) 36 0 R (cite.Ashley1988) 37 0 R
(cite.Kieft2008) 38 0 R]
>>
endobj
15 0 obj
<<
/Limits [(cite.Lawson2010) (cite.Verduin2015)]
/Names [(cite.Lawson2010) 39 0 R (cite.Li2008) 40 0 R (cite.Salvat2005) 41 0 R (cite.Schreiber2002) 42 0 R (cite.Verduin2014b) 43 0 R
(cite.Verduin2015) 44 0 R]
>>
endobj
16 0 obj
<<
/Limits [(cite.Villarrubia2014) (figure.caption.4)]
/Names [(cite.Villarrubia2014) 45 0 R (cnote.1) 46 0 R (figure.caption.1) 47 0 R (figure.caption.2) 48 0 R (figure.caption.3) 49 0 R
(figure.caption.4) 50 0 R]
>>
endobj
17 0 obj
<<
/Limits [(page.1) (page.6)]
/Names [(page.1) 51 0 R (page.2) 52 0 R (page.3) 53 0 R (page.4) 54 0 R (page.5) 55 0 R
(page.6) 56 0 R]
>>
endobj
18 0 obj
<<
/Limits [(page.7) (section.2)]
/Names [(page.7) 57 0 R (page.8) 58 0 R (section*.6) 59 0 R (section*.7) 60 0 R (section.1) 61 0 R
(section.2) 62 0 R]
>>
endobj
19 0 obj
<<
/Limits [(section.3) (table.caption.5)]
/Names [(section.3) 63 0 R (table.caption.5) 64 0 R]
>>
endobj
20 0 obj
<<
/Length 1931
/Filter /FlateDecode
>>
stream
x}XKs6Wpzf" W.m:&Q'd:I0 Kl)R!ȸί>@gL`V?@jt@&PyI&b*Cq>.*NΖ][Yh[]˄6c^V