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(C) 2020 The Optical Society
The Optical Society
Machine learning techniques applied for the detection of nanoparticles on surfaces using coherent Fourier scatterometry
2020-06-12
D. Kolenov
S. F. Pereira
1094-4087
10.1364/OE.395233
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Optics Express
(C) 2020 The Optical Society
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2020-06-12
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