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IEEE
IEEE Journal of Photovoltaics; ;PP;99;10.1109/JPHOTOV.2021.3059940
Doped silicon
material growth
material phases
nanocrystalline silicon
PECVD
precursor gas
silicon oxide
The Relation Between Precursor Gas Flows, Thickness Dependent Material Phases, and Opto-Electrical Properties of Doped a/nc-SiO<formula><tex>$_{X≥0}$</tex></formula>:H Films
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