%PDF-1.7
%
1 0 obj
<<
/Lang ()
/Metadata 2 0 R
/Names 3 0 R
/OpenAction [4 0 R /Fit]
/Outlines 5 0 R
/PageMode /UseOutlines
/Pages 6 0 R
/Type /Catalog
>>
endobj
7 0 obj
<<
/Author (G J Verbiest,M Goldsche,J Sonntag,T Khodkov,N von den Driesch,D Buca,C Stampfer)
/CreationDate (D:20210521053400Z)
/Creator (XeLateX with hyperref package)
/CrossMarkDomains#5B1#5D (iop.org)
/CrossMarkMajorVersionDate (2021-5-26)
/CrossmarkDomainExclusive (true)
/Keywords (graphene,resonators,tunable coupling,NEMS,MEMS)
/ModDate (D:20210607100509+02'00')
/Producer <58654C617465583B206D6F646966696564207573696E67206954657874AE20352E352E313020A9323030302D323031352069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/Subject (2D Materials, 8 \(2021\) 035039 doi: 10.1088/2053-1583/ac005e)
/Title (Tunable coupling of two mechanical resonators by a graphene membrane)
/doi (10.1088/2053-1583/ac005e)
/robots (noindex)
>>
endobj
2 0 obj
<<
/Length 16216
/Subtype /XML
/Type /Metadata
>>
stream
2021-05-21T05:34Z
2021-06-07T10:05:09+02:00
2021-06-07T10:05:09+02:00
XeLateX with hyperref package
graphene,resonators,tunable coupling,NEMS,MEMS
XeLateX; modified using iText® 5.5.10 ©2000-2015 iText Group NV (AGPL-version)
application/pdf
https://doi.org/10.1088/2053-1583/ac005e
IOP Publishing
2021-05-21T5:34
Text
2D Materials, 8 (2021) 035039 doi: 10.1088/2053-1583/ac005e
graphene
resonators
tunable coupling
NEMS
MEMS
Tunable coupling of two mechanical resonators by a graphene membrane
G J Verbiest,M Goldsche,J Sonntag,T Khodkov,N von den Driesch,D Buca,C Stampfer
uuid:c4675418-d7a8-4dc4-a7f2-b6c413efd75f
uuid:48dc2f53-7c7d-46c6-99f0-0ee166c77eea
2D Materials
journal
8
3
035039
2053-1583
1
8
10.1088/2053-1583/ac005e
https://doi.org/10.1088/2053-1583/ac005e
2021-5-26
true
10.1088/2053-1583/ac005e
iop.org
10.1088/2053-1583/ac005e
noindex
2021-5-26
true
iop.org
VoR
http://iopscience.iop.org/page/copyright
XMP Media Management Schema
xmpMM
http://ns.adobe.com/xap/1.0/mm/
DocumentID
URI
internal
UUID based identifier for all versions and renditions of a document
InstanceID
URI
internal
UUID based identifier for specific incarnation of a document
VersionID
Text
internal
Document version identifier
PRISM Basic Metadata
prism
http://prismstandard.org/namespaces/basic/2.1/
complianceProfile
Text
internal
PRISM specification compliance profile to which this document adheres
publicationName
Text
external
Publication name
aggregationType
Text
external
Publication type
bookEdition
Text
external
Edition of the book in which the document was published
volume
Text
external
Publication volume number
number
Text
external
Publication issue number within a volume
pageRange
Text
external
Page range for the document within the print version of its publication
issn
Text
external
ISSN for the printed publication in which the document was published
eIssn
Text
external
ISSN for the electronic publication in which the document was published
isbn
Text
external
ISBN for the publication in which the document was published
doi
Text
external
Digital Object Identifier for the document
url
URL
external
URL at which the document can be found
byteCount
Integer
internal
Approximate file size in octets
pageCount
Integer
internal
Number of pages in the print version of the document
subtitle
Text
external
Document's subtitle
endstream
endobj
3 0 obj
<<
/Dests 8 0 R
>>
endobj
4 0 obj
<<
/Annots [9 0 R 10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R
19 0 R 20 0 R 21 0 R 22 0 R 23 0 R 24 0 R 25 0 R 26 0 R 27 0 R 28 0 R
29 0 R 30 0 R 31 0 R 32 0 R 33 0 R 34 0 R 35 0 R 36 0 R 37 0 R 38 0 R
39 0 R 40 0 R 41 0 R 42 0 R 43 0 R 44 0 R 45 0 R 46 0 R 47 0 R 48 0 R
49 0 R 50 0 R 51 0 R 52 0 R 53 0 R 54 0 R 55 0 R 56 0 R 57 0 R 58 0 R
59 0 R 60 0 R]
/Contents 61 0 R
/CropBox [0 0 595.28 841.89]
/MediaBox [0 0 595.28 841.89]
/Parent 62 0 R
/Resources 63 0 R
/Rotate 0
/Type /Page
>>
endobj
5 0 obj
<<
/Count 7
/First 64 0 R
/Last 64 0 R
>>
endobj
6 0 obj
<<
/Count 10
/Kids [62 0 R 65 0 R 66 0 R 67 0 R]
/Type /Pages
>>
endobj
8 0 obj
<<
/Kids [68 0 R 69 0 R 70 0 R 71 0 R]
>>
endobj
9 0 obj
<<
/A <<
/S /URI
/URI (https://doi.org/10.1088/2053-1583/ac005e)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [418.381 797.664 552.756 806.144]
/Subtype /Link
/Type /Annot
>>
endobj
10 0 obj
<<
/A <<
/S /URI
/URI (https://crossmark.crossref.org/dialog/?doi=10.1088/2053-1583/ac005e&domain=pdf&date_stamp=2021-5-26)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [42.63 704.165 97.586 724.103]
/Subtype /Link
/Type /Annot
>>
endobj
11 0 obj
<<
/A <<
/S /URI
/URI (https://creativecommons.org/licenses/by/4.0/)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [42.52 538.562 95.199 545.77]
/Subtype /Link
/Type /Annot
>>
endobj
12 0 obj
<<
/A <<
/S /URI
/URI (https://creativecommons.org/licenses/by/4.0/)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [42.52 530.562 103.386 537.77]
/Subtype /Link
/Type /Annot
>>
endobj
13 0 obj
<<
/A <<
/D (0)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [166.925 650.722 169.709 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
14 0 obj
<<
/A <<
/D (1)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [171.101 650.722 173.884 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
15 0 obj
<<
/A <<
/D (2)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [175.276 652.38 179.11 654.963]
/Subtype /Link
/Type /Annot
>>
endobj
16 0 obj
<<
/A <<
/S /URI
/URI (https://orcid.org/0000-0002-1712-1234)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [179.11 646.856 189.11 656.851]
/Subtype /Link
/Type /Annot
>>
endobj
17 0 obj
<<
/A <<
/D (0)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [242.419 650.722 245.203 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
18 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [246.595 650.722 249.379 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
19 0 obj
<<
/A <<
/D (0)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [293.088 650.722 295.872 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
20 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [297.264 650.722 300.048 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
21 0 obj
<<
/A <<
/S /URI
/URI (https://orcid.org/0000-0002-6066-0436)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [300.048 646.856 310.048 656.851]
/Subtype /Link
/Type /Annot
>>
endobj
22 0 obj
<<
/A <<
/D (0)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [360.298 650.722 363.082 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
23 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [364.474 650.722 367.258 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
24 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [447.567 650.722 450.351 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
25 0 obj
<<
/A <<
/S /URI
/URI (https://orcid.org/0000-0003-0169-6110)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [450.351 646.856 460.35 656.851]
/Subtype /Link
/Type /Annot
>>
endobj
26 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [494.65 650.722 497.434 656.87]
/Subtype /Link
/Type /Annot
>>
endobj
27 0 obj
<<
/A <<
/S /URI
/URI (https://orcid.org/0000-0002-3692-5596)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [497.434 646.856 507.434 656.851]
/Subtype /Link
/Type /Annot
>>
endobj
28 0 obj
<<
/A <<
/D (0)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [182.464 636.729 185.248 642.877]
/Subtype /Link
/Type /Annot
>>
endobj
29 0 obj
<<
/A <<
/D (3)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [186.64 636.729 189.424 642.877]
/Subtype /Link
/Type /Annot
>>
endobj
30 0 obj
<<
/A <<
/S /URI
/URI (https://orcid.org/0000-0002-4958-7362)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [189.424 632.864 199.424 642.859]
/Subtype /Link
/Type /Annot
>>
endobj
31 0 obj
<<
/A <<
/S /URI
/URI (mailto:G.J.Verbiest@tudelft.nl)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [144.775 563.039 221.238 571.679]
/Subtype /Link
/Type /Annot
>>
endobj
32 0 obj
<<
/A <<
/S /URI
/URI (https://doi.org/10.1088/2053-1583/ac005e)
>>
/Border [0 0 0]
/C [0 1 1]
/H /I
/Rect [280.733 531.981 301.085 540.461]
/Subtype /Link
/Type /Annot
>>
endobj
33 0 obj
<<
/A <<
/D (6)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [148.689 202.478 153.489 213.078]
/Subtype /Link
/Type /Annot
>>
endobj
34 0 obj
<<
/A <<
/D (7)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [158.489 202.478 163.288 213.078]
/Subtype /Link
/Type /Annot
>>
endobj
35 0 obj
<<
/A <<
/D (8)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [246.65 202.478 251.45 213.078]
/Subtype /Link
/Type /Annot
>>
endobj
36 0 obj
<<
/A <<
/D (9)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [257.284 202.478 262.084 213.078]
/Subtype /Link
/Type /Annot
>>
endobj
37 0 obj
<<
/A <<
/D (a)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [233.23 189.978 238.03 200.578]
/Subtype /Link
/Type /Annot
>>
endobj
38 0 obj
<<
/A <<
/D (b)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [122.755 177.478 127.555 188.078]
/Subtype /Link
/Type /Annot
>>
endobj
39 0 obj
<<
/A <<
/D (c)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [190.39 152.478 195.19 163.078]
/Subtype /Link
/Type /Annot
>>
endobj
40 0 obj
<<
/A <<
/D (d)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [200.19 152.478 209.79 163.078]
/Subtype /Link
/Type /Annot
>>
endobj
41 0 obj
<<
/A <<
/D (e)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [139.242 127.478 148.842 138.078]
/Subtype /Link
/Type /Annot
>>
endobj
42 0 obj
<<
/A <<
/D (f)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [269.622 114.978 279.221 125.578]
/Subtype /Link
/Type /Annot
>>
endobj
43 0 obj
<<
/A <<
/D (10)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [274.42 102.478 284.02 113.078]
/Subtype /Link
/Type /Annot
>>
endobj
44 0 obj
<<
/A <<
/D (c)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [452.447 289.932 457.247 300.531]
/Subtype /Link
/Type /Annot
>>
endobj
45 0 obj
<<
/A <<
/D (11)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [462.856 289.932 467.656 300.531]
/Subtype /Link
/Type /Annot
>>
endobj
46 0 obj
<<
/A <<
/D (12)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [473.265 289.932 482.865 300.531]
/Subtype /Link
/Type /Annot
>>
endobj
47 0 obj
<<
/A <<
/D (13)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [488.473 289.932 498.073 300.531]
/Subtype /Link
/Type /Annot
>>
endobj
48 0 obj
<<
/A <<
/D (c)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [382.973 214.932 387.772 225.531]
/Subtype /Link
/Type /Annot
>>
endobj
49 0 obj
<<
/A <<
/D (14)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [448.779 139.932 458.379 150.531]
/Subtype /Link
/Type /Annot
>>
endobj
50 0 obj
<<
/A <<
/D (15)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [463.085 139.932 472.685 150.531]
/Subtype /Link
/Type /Annot
>>
endobj
51 0 obj
<<
/A <<
/D (16)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [436.768 127.432 446.368 138.031]
/Subtype /Link
/Type /Annot
>>
endobj
52 0 obj
<<
/A <<
/D (17)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [345.583 102.432 355.183 113.031]
/Subtype /Link
/Type /Annot
>>
endobj
53 0 obj
<<
/A <<
/D (18)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [360.183 102.432 369.783 113.031]
/Subtype /Link
/Type /Annot
>>
endobj
54 0 obj
<<
/A <<
/D (14)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [436.866 89.932 446.465 100.531]
/Subtype /Link
/Type /Annot
>>
endobj
55 0 obj
<<
/A <<
/D (19)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [451.243 89.932 460.843 100.531]
/Subtype /Link
/Type /Annot
>>
endobj
56 0 obj
<<
/A <<
/D (1a)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [537.056 77.432 546.656 88.031]
/Subtype /Link
/Type /Annot
>>
endobj
57 0 obj
<<
/A <<
/D (1b)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [437.38 64.932 446.98 75.531]
/Subtype /Link
/Type /Annot
>>
endobj
58 0 obj
<<
/A <<
/D (1c)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [451.98 64.932 461.58 75.531]
/Subtype /Link
/Type /Annot
>>
endobj
59 0 obj
<<
/A <<
/D (1d)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [524.856 64.932 534.456 75.531]
/Subtype /Link
/Type /Annot
>>
endobj
60 0 obj
<<
/A <<
/D (1e)
/S /GoTo
>>
/Border [0 0 0]
/C [1 0 0]
/H /I
/Rect [539.456 64.932 549.056 75.531]
/Subtype /Link
/Type /Annot
>>
endobj
61 0 obj
<<
/Length 5983
/Filter /FlateDecode
>>
stream
x=Ɏkq|ɢi hx K.ɢ,á,G:kIp(k"888yp60_3?9?!<~=hϙ3?>'i|8Ty&MsJ}_c_#wq;hǸ18sG΅\ӇT՜>t4o~=#K2RZA=Qaܗ<3} T|y?2'RVOW2Eм؏8!7iVi}JзpPvaZD7=.ؔ%3N!T
C=~ȄpetZCHU2b$/o냞AG05,8 Pq3&Dc"BZ@ӇM["I|`-̬҅!#G鱵Ka }ungW:ilӈGt+S2cJCf
r< i2Tr2P,\IsͮD&Q"E"/[6IDlcM|2NFN Qp>Ot8m&ޡ3I9)O`[V`u,L_>K$\\d)Wֈ5H|70*pm$H1BkaF45P3yն"].yQ!I%&4
w*0*seDHvղhd+v=0jf
'߷ Q^tv1+b''IUVũSYwd,UcQIylAW G@PZB+VDH+=Ǖ1aI{HfRb7mY&UOUKъHeƭ))P1'CLPX~Km)L7%_67YiAj@s%]7!rSܱ㬊%q^lR$eTee+ jvצa>g^KhKA&U)P
uL:9ق+- }ēvh8xOIuXk8ҵp6li}c(0?BK$lu6Y!$
F@u[LZP]IђJ53ՠLho0bPxE5 Ye4X$cNj nq1azO'% 8n*&/D$MDiBOHG&H ;RL뛇ϒ2sET^eǷ(3-D)\,*<f6K::ǔw^2AE2({"d{Ze
J8hΤՏ%eoc.g2w,bKFgsQ u.{B/QCHt
$Nd2D:2]
Q&Jԧ]u$1mʕ3Xy)l BlM& (Qi
J[:#nxdK"$Bԡ"j,안; "j,