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S. Hari
https://orcid.org/0000-0002-4773-8454
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(10)
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(1)
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(8)
Research output
7
Article
1
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1
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1
Dissertation (TU Delft)
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Dissertation (TU Delft)
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High resolution resist-free lithography in the SEM
Hari, S.
,
2017
,
227 p.
Research output
:
Thesis
›
Dissertation (TU Delft)
Open Access
File
resolution
100%
scanning electron microscopy
100%
resist
100%
electron beams
100%
Scanning Electron Microscopy
100%
307
Downloads (Pure)