Original language | English |
---|---|
IPC | H01L |
Priority date | 9/12/21 |
Publication status | Published - 2023 |
Bibliographical note
Patent: OCT-21-082Applicant: TU Delft
P. Manganiello (Inventor), D.A. van Nijen (Inventor), O. Isabella (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01L |
Priority date | 9/12/21 |
Publication status | Published - 2023 |