CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer

C Ortiz, LK Nanver, WD van Noort, TLM Scholtes, JW Slotboom

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	ICMTS 2002 IEEE 2002 International Conference on Microelectronic Test Structures
Place of Publication	Piscataway, NJ. USA
Publisher	IEEE Society
Pages	83-88
Number of pages	6
ISBN (Print)	0-7803-7464-9
Publication status	Published - 2002
Event	ICMTS 2002, Cork, Ireland - Piscataway, NJ. USA Duration: 8 Apr 2002 → 11 Apr 2002

Name
Publisher	IEEE

Conference	ICMTS 2002, Cork, Ireland
Period	8/04/02 → 11/04/02

Keywords

@inproceedings{f754c512be0249a4b5ac7f645dbe8907,

title = "CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer",

keywords = "Conf.proc. > 3 pag, ZX Int.klas.verslagjaar < 2002",

author = "C Ortiz and LK Nanver and {van Noort}, WD and TLM Scholtes and JW Slotboom",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-7803-7464-9",

publisher = "IEEE Society",

pages = "83--88",

booktitle = "ICMTS 2002 IEEE 2002 International Conference on Microelectronic Test Structures",

note = "ICMTS 2002, Cork, Ireland ; Conference date: 08-04-2002 Through 11-04-2002",

}

CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer. / Ortiz, C; Nanver, LK; van Noort, WD et al.
ICMTS 2002 IEEE 2002 International Conference on Microelectronic Test Structures. Piscataway, NJ. USA: IEEE Society, 2002. p. 83-88.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer

AU - Ortiz, C

AU - Nanver, LK

AU - van Noort, WD

AU - Scholtes, TLM

AU - Slotboom, JW

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-7464-9

SP - 83

EP - 88

BT - ICMTS 2002 IEEE 2002 International Conference on Microelectronic Test Structures

PB - IEEE Society

CY - Piscataway, NJ. USA

T2 - ICMTS 2002, Cork, Ireland

Y2 - 8 April 2002 through 11 April 2002

ER -