Interim recommendations for a diffusion barrier process suitable for 0.25 micrometer technologies

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationDelft
    PublisherTechnische Universiteit Delft
    Number of pages4
    Publication statusPublished - 1996

    Publication series

    Name
    PublisherTechnische Universiteit Delft

    Cite this