Codes and data associated with the processing of the pre-charged CMUT characterisation



This dataset contains the data relative to the characterisation of the pre-charged collapse-mode CMUTs. To characterise them, the I-V curves (current-voltage) curves of test capacitors fabricated in the same process flow were measured until breakdown. The CMUTs were then characterised by mesuring the shift in C-V (capacitance-voltage) curve after charging, their impedance and the membrane profile using a digital holographic microscope. To assess their charge retention over time, accelerated lifetime tests were perfomed and their impedance was measured over time to detect the time to failure. A readme file is included with explanation of each folder content. Each folder includes also a readme file with explanation of the content.
Date made available19 Mar 2024
PublisherTU Delft - 4TU.ResearchData
Date of data production2024 -

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