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M. Jahangiri, PhD
Electrical Engineering, Mathematics and Computer Science
,
Electronic Instrumentation
https://orcid.org/0000-0003-0799-1305
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Research output
(4)
Similar Profiles
(6)
Research output
2
Conference contribution
1
Paper
1
Poster
Research output per year
Research output per year
1 results
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Paper
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2023
Ultra-Thin Uncooled Integrable-on-Chip Detector to Measure Wide Infrared Radiation Residue in Lithography Exposure and Metrology Inspection Tools
Jahangiri, M.
,
Pawluczyk, J.
,
Dąbrowski, K.
&
Nihtianov, S.
,
2023
.
9 p.
Research output
:
Contribution to conference
›
Paper
›
peer-review
Open Access
File
infrared radiation
100%
lasers
100%
metrology
100%
inspection
100%
residues
100%
57
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