@inproceedings{42c95b12f72c405f81d8549477de114c,
title = "In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "HTM Pham and {de Boer}, CR and J Wei and PM Sarro",
year = "2007",
language = "Undefined/Unknown",
isbn = "1-4244-0842-3",
publisher = "IEEE Society",
pages = "497--500",
editor = "G Delapierre and R Puers",
booktitle = "Proc. Transducers 2007 Conference",
}