Abstract
This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior art. Moreover, it also offers a 117dB in-band (1kHz) Common-mode Rejection Ratio (CMRR), providing decent electric field interference immunity.
Original language | English |
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Title of host publication | 2018 Symposium on VLSI Circuits Digest of Technical Papers |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 159-160 |
Number of pages | 2 |
Volume | 2018-June |
ISBN (Electronic) | 978-1-5386-4214-6 |
DOIs | |
Publication status | Published - 2018 |
Event | 2018 Symposia on VLSI Technology and Circuits: 2018 VLSI Technology Symposium - 2018 VLSI Circuits - Hilton Hawaiian Village, Honolulu, United States Duration: 18 Jun 2018 → 22 Jun 2018 |
Conference
Conference | 2018 Symposia on VLSI Technology and Circuits |
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Country/Territory | United States |
City | Honolulu |
Period | 18/06/18 → 22/06/18 |
Keywords
- Sensors
- Electrodes
- Interference
- Energy efficiency
- Electric fields
- Capacitors
- Signal to noise ratio