A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target

Hui Jiang, Samira Amani, Johan G. Vogel, Saleh Heidary Shalmany, Stoyan Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
14 Downloads (Pure)

Abstract

This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior art. Moreover, it also offers a 117dB in-band (1kHz) Common-mode Rejection Ratio (CMRR), providing decent electric field interference immunity.

Original languageEnglish
Title of host publication2018 Symposium on VLSI Circuits Digest of Technical Papers
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages159-160
Number of pages2
Volume2018-June
ISBN (Electronic)978-1-5386-4214-6
DOIs
Publication statusPublished - 2018
Event2018 Symposia on VLSI Technology and Circuits: 2018 VLSI Technology Symposium - 2018 VLSI Circuits - Hilton Hawaiian Village, Honolulu, United States
Duration: 18 Jun 201822 Jun 2018

Conference

Conference2018 Symposia on VLSI Technology and Circuits
CountryUnited States
CityHonolulu
Period18/06/1822/06/18

Keywords

  • Sensors
  • Electrodes
  • Interference
  • Energy efficiency
  • Electric fields
  • Capacitors
  • Signal to noise ratio

Fingerprint Dive into the research topics of 'A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target'. Together they form a unique fingerprint.

Cite this