A compact low-stiffness six degrees of freedom compliant precision stage

AG Dunning, N Tolou, JL Herder

Research output: Contribution to journal › Article › Scientific › peer-review

26 Citations (Scopus)

Keywords

@article{b19faf6411eb4f9894e643364843707e,

title = "A compact low-stiffness six degrees of freedom compliant precision stage",

keywords = "CWTS JFIS < 0.75",

author = "AG Dunning and N Tolou and JL Herder",

year = "2013",

doi = "10.1016/j.precisioneng.2012.10.007",

language = "English",

volume = "37",

pages = "380--388",

journal = "Precision Engineering",

issn = "0141-6359",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - A compact low-stiffness six degrees of freedom compliant precision stage

AU - Dunning, AG

AU - Tolou, N

AU - Herder, JL

PY - 2013

Y1 - 2013

KW - CWTS JFIS < 0.75

U2 - 10.1016/j.precisioneng.2012.10.007

DO - 10.1016/j.precisioneng.2012.10.007

M3 - Article

SN - 0141-6359

VL - 37

SP - 380

EP - 388

JO - Precision Engineering

JF - Precision Engineering

IS - 2

ER -