A compact low-stiffness six degrees of freedom compliant precision stage

AG Dunning, N Tolou, JL Herder

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)380-388
Number of pages9
JournalPrecision Engineering
Volume37
Issue number2
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS JFIS < 0.75

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