A comprehensive model to study nonlinear behavior of multilayered micro beam switches

G Rezazadeh; H Sadeghian Marnani; E Abbaspour

doi:10.1007/s00542-007-0398-x

A comprehensive model to study nonlinear behavior of multilayered micro beam switches

G Rezazadeh, H Sadeghian Marnani, E Abbaspour

Computational Design and Mechanics

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Abstract

A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.

Original language	Undefined/Unknown
Pages (from-to)	1-7
Number of pages	7
Journal	Microsystem Technologies: micro and nanosystems - information storage and processing systems
DOIs	https://doi.org/10.1007/s00542-007-0398-x
Publication status	Published - 2007

Keywords

academic journal papers
CWTS JFIS < 0.75

Access to Document

10.1007/s00542-007-0398-x

Cite this

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title = "A comprehensive model to study nonlinear behavior of multilayered micro beam switches",

abstract = "A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.",

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AU - Rezazadeh, G

AU - Sadeghian Marnani, H

AU - Abbaspour, E

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Y1 - 2007

N2 - A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.

AB - A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.

KW - academic journal papers

KW - CWTS JFIS < 0.75

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JO - Microsystem Technologies: micro and nanosystems - information storage and processing systems

JF - Microsystem Technologies: micro and nanosystems - information storage and processing systems

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