A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.
|Number of pages||7|
|Journal||Microsystem Technologies: micro and nanosystems - information storage and processing systems|
|Publication status||Published - 2007|
- academic journal papers
- CWTS JFIS < 0.75