A comprehensive model to study nonlinear behavior of multilayered micro beam switches

G Rezazadeh, H Sadeghian Marnani, E Abbaspour

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)


A novel model to study the pull-in behavior of nonlinear electromechanically coupled systems has been developed. The proposed model is based on the multilayered cantilever and fixed-fixed micro beam type MEMS switches. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are not generally available; therefore, the derived nonlinear equation has been numerically solved fully using the nonlinear finite difference method. Furthermore, the results obtained are summarized and compared with the other existing empirical and analytical models. These results can be useful in the optimization of MEMS switch designs or other actuators. In addition, the method developed in this paper has a good potential for analyzing other types of complex MEMS devices.
Original languageUndefined/Unknown
Pages (from-to)1-7
Number of pages7
JournalMicrosystem Technologies: micro and nanosystems - information storage and processing systems
Publication statusPublished - 2007


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