A full-system dynamic model for complex MEMS structures

LA Rocha; E Cretu; RF Wolffenbuttel

A full-system dynamic model for complex MEMS structures

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM
Place of Publication	Camebridge, MA. USA
Publisher	Nano Science and Technology Institute
Pages	203-206
Number of pages	4
ISBN (Print)	0-9728422-6-8
Publication status	Published - 2004
Event	2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA - Camebridge, MA. USA Duration: 7 Mar 2004 → 11 Mar 2004

Publication series

Name
Publisher	Nano Science and Technology Institute

Conference

Conference	2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA
Period	7/03/04 → 11/03/04

Bibliographical note

ed. is niet bekend

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{0a5a5038e5774e99984171359182f46e,

title = "A full-system dynamic model for complex MEMS structures",

keywords = "Conf.proc. > 3 pag",

author = "LA Rocha and E Cretu and RF Wolffenbuttel",

note = "ed. is niet bekend; 2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA ; Conference date: 07-03-2004 Through 11-03-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-9728422-6-8",

publisher = "Nano Science and Technology Institute",

pages = "203--206",

booktitle = "Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM",

}

Rocha, LA, Cretu, E & Wolffenbuttel, RF 2004, A full-system dynamic model for complex MEMS structures. in Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM. Nano Science and Technology Institute, Camebridge, MA. USA, pp. 203-206, 2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA, 7/03/04.

A full-system dynamic model for complex MEMS structures. / Rocha, LA; Cretu, E; Wolffenbuttel, RF.
Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM. Camebridge, MA. USA: Nano Science and Technology Institute, 2004. p. 203-206.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A full-system dynamic model for complex MEMS structures

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-9728422-6-8

SP - 203

EP - 206

BT - Nanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM

PB - Nano Science and Technology Institute

CY - Camebridge, MA. USA

T2 - 2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA

Y2 - 7 March 2004 through 11 March 2004

ER -