A full-system dynamic model for complex MEMS structures

LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationNanotech 2004; Technical proceedings of the 2004 NSTI nanotechnology conference and trade show on CD-ROM
Place of PublicationCamebridge, MA. USA
PublisherNano Science and Technology Institute
Pages203-206
Number of pages4
ISBN (Print)0-9728422-6-8
Publication statusPublished - 2004
Event2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA - Camebridge, MA. USA
Duration: 7 Mar 200411 Mar 2004

Publication series

Name
PublisherNano Science and Technology Institute

Conference

Conference2004 NSTI nanotechnology conference and trade show on CD-ROM, Boston, MA. USA
Period7/03/0411/03/04

Keywords

  • Conf.proc. > 3 pag

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