A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology

Jiarui Mo; Jinglin Li; Yaqian Zhang; Joost Romijn; Alexander May; Tobias Erlbacher; Guoqi Zhang; Sten Vollebregt

doi:10.1109/LED.2023.3268334

A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology

Jiarui Mo, Jinglin Li, Yaqian Zhang, Joost Romijn, Alexander May, Tobias Erlbacher, Guoqi Zhang, Sten Vollebregt

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Abstract

In this work, a highly linear temperature sensor based on a silicon carbide (SiC) p-n diode is presented. Under a constant current biasing, the diode has an excellent linear response to the temperature (from room temperature to 600°C). The best linearity (coefficient of determination ${R}^{{2}}$ = 99.98%) is achieved when the current density is 0.53 mA/cm2. The maximum sensitivity of the p-n diode is 3.04 mV/°C. The temperature sensor is fully compatible with Fraunhofer Institute (FHG) IISB's open SiC CMOS (complementary metal-oxide-semiconductor) technology, thus enabling the monolithic integration with SiC readout circuits for high-temperature applications. The sensor also features a simple fabrication process. To our knowledge, the presented device is the first SiC diode temperature sensor that does not require a mesa etch or backside contacts.

Original language	English
Pages (from-to)	995-998
Number of pages	4
Journal	IEEE Electron Device Letters
Volume	44
Issue number	6
DOIs	https://doi.org/10.1109/LED.2023.3268334
Publication status	Published - 2023

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

high temperature
Linearity
p-n diode
Schottky diodes
Sensitivity
Silicon carbide
Temperature distribution
Temperature measurement
temperature sensor
Temperature sensors

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A_Highly_Linear_Temperature_Sensor_Operating_up_to_600C_in_a_4H-SiC_CMOS_TechnologyFinal published version, 901 KB

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title = "A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology",

abstract = "In this work, a highly linear temperature sensor based on a silicon carbide (SiC) p-n diode is presented. Under a constant current biasing, the diode has an excellent linear response to the temperature (from room temperature to 600°C). The best linearity (coefficient of determination ${R}^{{2}}$ = 99.98%) is achieved when the current density is 0.53 mA/cm2. The maximum sensitivity of the p-n diode is 3.04 mV/°C. The temperature sensor is fully compatible with Fraunhofer Institute (FHG) IISB's open SiC CMOS (complementary metal-oxide-semiconductor) technology, thus enabling the monolithic integration with SiC readout circuits for high-temperature applications. The sensor also features a simple fabrication process. To our knowledge, the presented device is the first SiC diode temperature sensor that does not require a mesa etch or backside contacts.",

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AU - May, Alexander

AU - Erlbacher, Tobias

AU - Zhang, Guoqi

AU - Vollebregt, Sten

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N2 - In this work, a highly linear temperature sensor based on a silicon carbide (SiC) p-n diode is presented. Under a constant current biasing, the diode has an excellent linear response to the temperature (from room temperature to 600°C). The best linearity (coefficient of determination ${R}^{{2}}$ = 99.98%) is achieved when the current density is 0.53 mA/cm2. The maximum sensitivity of the p-n diode is 3.04 mV/°C. The temperature sensor is fully compatible with Fraunhofer Institute (FHG) IISB's open SiC CMOS (complementary metal-oxide-semiconductor) technology, thus enabling the monolithic integration with SiC readout circuits for high-temperature applications. The sensor also features a simple fabrication process. To our knowledge, the presented device is the first SiC diode temperature sensor that does not require a mesa etch or backside contacts.

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A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology

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