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A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface
A. C. De Oliveira, T. V.P. Schut, J. Groenesteijn, Q. Fan, R. J. Wiegerink, K. A.A. Makinwa
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6
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(Scopus)
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