A new finite element approach to stress analysis in microfabrication technology

S Mijalkovic

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	837-845
Number of pages	9
Journal	Microelectronics Reliability
Volume	41
Publication status	Published - 2001

Keywords

@article{35cf5ccb7cef433998762b075803262c,

title = "A new finite element approach to stress analysis in microfabrication technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Mijalkovic",

year = "2001",

language = "Undefined/Unknown",

volume = "41",

pages = "837--845",

journal = "Microelectronics Reliability",

issn = "0026-2714",

publisher = "Elsevier",

}