The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry . Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 ).
|Title of host publication||2018 IEEE International Solid-State Circuits Conference, ISSCC 2018|
|Subtitle of host publication||Digest of Technical Papers|
|Place of Publication||Lewiston, USA|
|Number of pages||3|
|Publication status||Published - 2018|
|Event||65th IEEE International Solid-State Circuits Conference, ISSCC 2018 - San Francisco, United States|
Duration: 11 Feb 2018 → 15 Feb 2018
|Conference||65th IEEE International Solid-State Circuits Conference, ISSCC 2018|
|Period||11/02/18 → 15/02/18|
Bibliographical noteGreen Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
- Semiconductor device measurement
- Temperature measurement
- Temperature sensors