A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Angel Savov, Shivani Joshi, Salman Shafqat, Johan Hoefnagels, Marcus Louwerse, Ronald Stoute, Ronald Dekker

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
42 Downloads (Pure)

Abstract

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and mounting of these free-standing structures, the device is designed to be fabricated as a single chip/unit that is separated into two independently movable parts after it is fixed in the tensile test stage. Furthermore, the fabrication method allows for test structures of different geometries to be easily fabricated on the same substrate. The utility of the device has been demonstrated by stretching the free-standing interconnect structures in excess of 1000% while simultaneously measuring their electrical resistance. Important design considerations and encountered processing challenges and their solutions are discussed in this paper.
Original languageEnglish
Article number39
Pages (from-to)1-13
Number of pages13
JournalMicromachines
Volume9
Issue number1
DOIs
Publication statusPublished - 2018

Keywords

  • stretchable electronics
  • stretchable interconnects
  • MEMS
  • mechanical characterization
  • electrical characterization
  • free standing interconnects
  • OA-Fund TU Delft

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