A sampling problem from lithography for chip layout

EA Cator, TJ Dijkema, M Hochstenbach, W Mulckhuyse, MA Peletier, G Prokert, W Weij, D Worm

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the Fifty-Eighth European Study Group Mathematics with Industry
    EditorsRH Bisseling, K Dajani, TJ Dijkema, J van de Leur, PA Zegeling
    Place of PublicationAmsterdam
    PublisherCentrum Wiskunde & Informatica
    Pages45-53
    Number of pages9
    Publication statusPublished - 2007
    EventESGI58/SWI2007 - Amsterdam
    Duration: 29 Jan 20072 Feb 2007

    Publication series

    Name
    PublisherCWI

    Conference

    ConferenceESGI58/SWI2007
    Period29/01/072/02/07

    Keywords

    • Wiskunde en Informatica
    • Techniek
    • technische Wiskunde en Informatica
    • Conf.proc. > 3 pag

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