A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane

V Mohammadi; WB De Boer; TLM Scholtes; LK Nanver

doi:10.1149/04531.0057ecst

A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane

V Mohammadi, WB De Boer, TLM Scholtes, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting
Editors	JW Fergus et al
Place of Publication	Pennington
Publisher	Electrochemical Society
Pages	57-65
Number of pages	9
ISBN (Print)	978-1-62332-054-6
DOIs	https://doi.org/10.1149/04531.0057ecst
Publication status	Published - 2013
Event	Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting, Seattle, USA - Pennington Duration: 6 May 2012 → 10 May 2012

Publication series

Name
Publisher	Electrochemical Society

Name	ECS Transactions
Volume	45
ISSN (Print)	1938-5862

Conference

Conference	Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting, Seattle, USA
Period	6/05/12 → 10/05/12

Bibliographical note

Harvest

Access to Document

10.1149/04531.0057ecst

Cite this

Mohammadi, V., De Boer, WB., Scholtes, TLM., & Nanver, LK. (2013). A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane. In JW. Fergus et al (Ed.), Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting (pp. 57-65). (ECS Transactions; Vol. 45). Electrochemical Society. https://doi.org/10.1149/04531.0057ecst

@inproceedings{e29c2cce73644e9b9874ab197abf3d51,

title = "A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane",

author = "V Mohammadi and {De Boer}, WB and TLM Scholtes and LK Nanver",

note = "Harvest; Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting, Seattle, USA ; Conference date: 06-05-2012 Through 10-05-2012",

year = "2013",

doi = "10.1149/04531.0057ecst",

language = "Undefined/Unknown",

isbn = "978-1-62332-054-6",

publisher = "Electrochemical Society",

pages = "57--65",

editor = "{Fergus et al}, JW",

booktitle = "Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting",

}

Mohammadi, V, De Boer, WB, Scholtes, TLM & Nanver, LK 2013, A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane. in JW Fergus et al (ed.), Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. ECS Transactions, vol. 45, Electrochemical Society, Pennington, pp. 57-65, Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting, Seattle, USA, 6/05/12. https://doi.org/10.1149/04531.0057ecst

A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane. / Mohammadi, V; De Boer, WB; Scholtes, TLM et al.
Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. ed. / JW Fergus et al. Pennington: Electrochemical Society, 2013. p. 57-65 (ECS Transactions; Vol. 45).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane

AU - Mohammadi, V

AU - De Boer, WB

AU - Scholtes, TLM

AU - Nanver, LK

N1 - Harvest

PY - 2013

Y1 - 2013

U2 - 10.1149/04531.0057ecst

DO - 10.1149/04531.0057ecst

M3 - Conference contribution

SN - 978-1-62332-054-6

SP - 57

EP - 65

BT - Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting

A2 - Fergus et al, JW

PB - Electrochemical Society

CY - Pennington

T2 - Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting, Seattle, USA

Y2 - 6 May 2012 through 10 May 2012

ER -

Mohammadi V, De Boer WB, Scholtes TLM, Nanver LK. A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane. In Fergus et al JW, editor, Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. Pennington: Electrochemical Society. 2013. p. 57-65. (ECS Transactions). doi: 10.1149/04531.0057ecst