A test structure to characterize the piezojunction effect and its influence on silicon temperature sensors

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Eurosensors XIII: proceedings [CD-ROM]
Editors	M Bartek
Place of Publication	Delft
Publisher	Delft University of Technology
Pages	53-56
Number of pages	4
ISBN (Print)	90-76699-02-X
Publication status	Published - 1999
Event	13th European Conference on Solid-State Transducers, The Hague - Delft Duration: 12 Sept 1999 → 15 Sept 1999

Name
Publisher	Delft University of Technology

Conference	13th European Conference on Solid-State Transducers, The Hague
Period	12/09/99 → 15/09/99

Keywords

@inproceedings{a5398eab54c14f27897e100ff851d8b7,

title = "A test structure to characterize the piezojunction effect and its influence on silicon temperature sensors",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "F Fruett and GCM Meijer",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-76699-02-X",

publisher = "Delft University of Technology",

pages = "53--56",

editor = "{M Bartek}",

booktitle = "Eurosensors XIII: proceedings [CD-ROM]",

address = "Netherlands",

note = "13th European Conference on Solid-State Transducers, The Hague ; Conference date: 12-09-1999 Through 15-09-1999",

}

TY - GEN

T1 - A test structure to characterize the piezojunction effect and its influence on silicon temperature sensors

AU - Fruett, F

AU - Meijer, GCM

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-76699-02-X

SP - 53

EP - 56

BT - Eurosensors XIII: proceedings [CD-ROM]

A2 - M Bartek, null

PB - Delft University of Technology

CY - Delft

T2 - 13th European Conference on Solid-State Transducers, The Hague

Y2 - 12 September 1999 through 15 September 1999

ER -