TY - JOUR
T1 - Acoustic subsurface-atomic force microscopy
T2 - Three-dimensional imaging at the nanoscale
AU - Sharahi, Hossein J.
AU - Janmaleki, Mohsen
AU - Tetard, Laurene
AU - Kim, Seonghwan
AU - Sadeghian, Hamed
AU - Verbiest, Gerard J.
PY - 2021
Y1 - 2021
N2 - The development of acoustic subsurface atomic force microscopy, which promises three-dimensional imaging with single-digit nanometer resolution by the introduction of ultrasound actuations to a conventional atomic force microscope, has come a long way since its inception in the early 1990s. Recent advances provide a quantitative understanding of the different experimentally observed contrast mechanisms, which paves the way for future applications. In this Perspective, we first review the different subsurface atomic force microscope modalities: ultrasonic force microscopy, atomic force acoustic microscopy, heterodyne force microscopy, mode-synthesizing atomic force microscopy, and near-field picosecond ultrasonic microscopy. Then, we highlight and resolve a debate existing in the literature on the importance of the chosen ultrasound excitation frequencies with respect to the resonance frequencies of the cantilever and the observed contrast mechanisms. Finally, we discuss remaining open problems in the field and motivate the importance of new actuators, near-field picosecond ultrasonics, and integration with other techniques to achieve multi-functional non-destructive three-dimensional imaging at the nanoscale.
AB - The development of acoustic subsurface atomic force microscopy, which promises three-dimensional imaging with single-digit nanometer resolution by the introduction of ultrasound actuations to a conventional atomic force microscope, has come a long way since its inception in the early 1990s. Recent advances provide a quantitative understanding of the different experimentally observed contrast mechanisms, which paves the way for future applications. In this Perspective, we first review the different subsurface atomic force microscope modalities: ultrasonic force microscopy, atomic force acoustic microscopy, heterodyne force microscopy, mode-synthesizing atomic force microscopy, and near-field picosecond ultrasonic microscopy. Then, we highlight and resolve a debate existing in the literature on the importance of the chosen ultrasound excitation frequencies with respect to the resonance frequencies of the cantilever and the observed contrast mechanisms. Finally, we discuss remaining open problems in the field and motivate the importance of new actuators, near-field picosecond ultrasonics, and integration with other techniques to achieve multi-functional non-destructive three-dimensional imaging at the nanoscale.
UR - http://www.scopus.com/inward/record.url?scp=85099497718&partnerID=8YFLogxK
U2 - 10.1063/5.0035151
DO - 10.1063/5.0035151
M3 - Article
AN - SCOPUS:85099497718
SN - 0021-8979
VL - 129
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 3
M1 - 030901
ER -